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MB20 In-Vacuum XYZ Manipulator
MB20 In-Vacuum XYZ Manipulator

MB20-in-vac is the XYZ linear manipulator in the MB20 series, built to run in vacuum.

The MB20 is a high-precision, large-bore, long-travel XYZ manipulator with UHV all-metal bellows isolation. Stepper motors rated for UHV operation are required. The frame is meant to stay rigid and to carry heavy atmospheric and instrument loads, on the order of 200 lb (90 kg) for the standard series. The in-vac variant maintains this architecture, with the bellows providing vac-to-vac isolation for ultra-pure gas isolation, plasma physics experiments, and other high-rigidity metal isolation manipulation requirements. The bellows may also be omitted for a high rigidity fully UHV rated linear manipulator on a proven platform. All fasteners and large face joints are vented for minimization of virtual leaks.

In-vac versions of all our standard UHV manipulators are also available.

Specifications:

- Model: MB20, in-vacuum MB20 series

- Bellows ID, MB20 series: 4.0 inches (101 mm)

- XY travel, MB20 series: ±0.5 inch (12.5 mm) or ±1.0 inch (25 mm), circular pattern

- Series options: top-flange tilt ±2°, X drive on either side, optional 8 inch or 10 inch base flange

- Lubricant in vacuum: Apiezon L or equivalent, only

Options

CONTACT FACTORY FOR CUSTOMIZATIONS AND ADDITIONAL OPTIONS