In-Vacuum Manipulators with UHV Compatible Piezoelectric drive motors, providing sub-nanometer step size.

The unit shown is an extremely compact, light-load gantry stage with ±8 mm (±0.31″) travel in X, Y, and Z. Travel, load capacity, and configuration are fully customizable.

Rotation options are also available. For two-axis configurations, see the 2 Axes In-Vacuum Manipulator.

Contact factory for custom solutions specific to your needs.

Options

CONTACT FACTORY FOR CUSTOMIZATIONS AND ADDITIONAL OPTIONS