The Beam Flux Monitor places an ion gauge in the beam from evaporation and MBE sources, at the sample position, to measure beam equivalent pressure (BEP). The gauge retracts out of the beam path before deposition, so the same position can be checked before each run and sources can be set to known flux.

• Ion gauge mounted on the end of a re-entrant tube
• Linear motion by a BLT45S translator
• Angled front shield in tantalum or stainless steel
• Optional gate valve and load-lock for filament replacement
• Stroke and flange-to-gauge distance specified at order

Flux at the sample position

The gauge reads flux where the sample sits, not at the source. Readings can be taken for each source in turn and compared from run to run, then the gauge is withdrawn clear of the beam.

Filament replacement without venting

With the optional gate valve and load-lock, the gauge retracts behind the valve. The valve isolates the main chamber, and the gauge section can be vented by itself to replace filaments. The main chamber stays under vacuum.

Built on the BLT45S

The re-entrant tube is driven by a standard BLT45S slimline translator. Its drive options, including manual and stepper motor drives, apply to the Beam Flux Monitor.

Options

• Front shield material: tantalum or stainless steel
• Gate valve and load-lock for filament replacement, configured to order
• Stroke: any length to order; 16″ (400 mm) as built to date
• Mounting flange: 4.5″ (CF63)
• Flange-to-gauge distance to suit the chamber geometry and sample position
• Drive: manual or motorized, as for the BLT45S
• Ion gauge controller (available separately)

Tech Specs

• Gauge: nude Bayard-Alpert ion gauge, dual filament
• Actuator: BLT45S linear translator
• Stroke: to order (16″ (400 mm) as built)
• Mounting flange: 4.5″ (CF63)
• Front shield: tantalum or stainless steel, angled
• Filament replacement: optional gate valve and load-lock