Standard sizes for 2.75″ (DN40CF) through 12″ (DN250CF) CF flanges
Sometimes a port on the vacuum chamber is off in position as well as angle, and tilt alone will not bring a device onto its target. The MTS Hexapod Port Aligner corrects both. Two UHV CF flanges are joined by a welded bellows and positioned relative to each other by six adjustable turnbuckle legs. The legs set X and Y offset, Z (length), and tilt about both axes, then hold the setting rigidly.
This makes for easy alignment of long or heavy devices such as magnetic introduction arms, transfer rods, and probes, where tilt correction alone leaves an offset at the aim point.
For tilt-only correction, see the PA275 spherical port aligner or the Jacking Port Aligner. For larger tilt ranges, see the McTilt gimbal tilt stages.
- Flange sizes: 2.75″ (DN40CF), 4.5″ (CF63), 6″ (CF100), 8″ (DN150CF/DN160CF) and 12″ (DN250CF) standard; other sizes on request
- XY offset: ±0.2″ (±5 mm) and up, depending on size
- Tilt: ±5° and up in both axes
- Z adjustment: ±0.2″ (±5 mm) and up, depending on size
- Bakeable to at least 200°C and over 300°C with dry-film lubricant on turnbuckles
Options
6DOF option: one end can be supplied as a rotatable CF flange, allowing the mounted device to be clocked through a full 360°. The rotatable flange (the sixth degree of freedom) can only be turned while its gasket is unbolted; it is not adjustable under vacuum. For axial rotation under vacuum, see the DPRF differentially pumped rotary platforms.
CONTACT FACTORY FOR CUSTOMIZATIONS AND ADDITIONAL OPTIONS