Manufacturers of surface analytical instruments and devices
MA2000 Instructions and User's Manual
THANK YOU for your purchase of MTS' MA2000-series XYZ sample manipulator. It is the finest of its kind available. We appreciate the confidence you have placed in our company. We encourage your comments and suggestions on this product and its manual. Please read this manual carefully prior to assembling/mounting your manipulator. We have found this will answer many of the commonly asked questions, saving time and aiding understanding. It will be time well spent.
Check for Damage:Many shipping companies require that claims for damage and/or loss be filed within a very short period of time, sometimes within one week of delivery! Promptly inspect the shipment for exterior as well as hidden damage. If any damage or loss is encountered, be sure to do ALL of the following:
- Notify the shipper promptly. If the damage is significant, insist on an on-site inspection.
- Retain ALL packing materials.
- Do not proceed with installation or unpacking.
- Do not allow the shipping company to remove the goods from your premises without first notifying MTS.
Verify the shipment received against the enclosed packing list and against your order. Notify MTS promptly of any discrepancies. Clean any debris, dust or stray packaging material from the manipulator before removing the flange covers. Check for any loose screws.
Unpackaging Instructions:Inspect the unit for hidden damage from shipment. Translators are shipped with custom foam-in-place packing. We have found this to be the best way. The foam is separated approximately halfway inside the carton with thin white plastic. The unit is also bagged in polyethylene, and the flanges are covered with aluminum foil and plastic covers. The bellows is shipped in the compressed position and is wrapped to prevent damage. All of this is designed to get the unit to you in the same condition it left our shop. We recommend you save the packing box and materials, if possible, for equipment or possible future shipment.
- Take the manipulator out of the box on a clean, dry, level surface.
- Unwrap the bellows.
- REMOVE THE SHIPPING CLAMP SCREW COMPLETELY! Be sure to save it for later use.
- Install the micrometers. We ship your unit with the micrometers removed to prevent damage. The screws for each micrometer are enclosed in a ziplock bag and packaged with the micrometers. Re-assembly is a rather simple process. Insert the screws in the appropriate holes in the micrometer mount. Line up the screws and the micrometer load nut with the mating holes/part on the manipulator. Start the screws, but do not tighten. Next, thread the knurled micrometer nut onto the micrometer insertion bracket. Tighten only finger tight. Finish tightening the two screws. Repeat the process for the other micrometer.
- Remove the shipping covers and aluminum foil from the flanges. The manipulator is now ready for installation.
Under normal conditions your manipulator will provide years of trouble-free service, especially if the following simple maintenance is performed. After several bakeouts, it may be necessary to re-lubricate the lead screw and/or micrometers. Use the MoS2 grease in the supplied syringe. The micrometers can be removed for easier access. When replacing the screws in the micrometer brackets or any other location on the manipulator, be sure to re-coat the threads with an anti-seize compound.
- Do not allow contamination to get into the bellows interior.
- The stainless steel bellows is made from thin material and is fragile. Do not hit it or allow it to hit other objects.
- Do not over-travel the unit. Hitting the side of the bellows may cause damage.
Use the appropriate bolts, nuts, washers and gaskets to mount the manipulator to your chamber. The standard MA2000-series manipulator uses the following bolt sizes:
| Location | Nominal Flange Size |
Bolts SAE (Metric) Sizes |
|---|---|---|
(Standard tapped) |
(70 mm) |
(M6 X 1 X 20) |
(Standard tapped) |
(34 mm) |
(M4 X 0.8 X 15) |
(Standard non-tapped) |
(150 mm) |
(M8 X 1.25 X 50) |
When tightening the flange bolts, make sure the bolt heads and threads are in good condition, the threads are lubricated with anti-seize material and that the wrench fits properly. Turn the bolts deliberately and with great care. A stripped, seized or broken bolt can be frustrating. A slipped wrench can puncture the bellows or injure hands. Install the MA2000-series manipulator on your chamber/flange as you would any other ConFlat type flange. Use standard, 0.080" thick, flat copper gaskets. The following tightening sequence for lubricated bolts with washers is recommended. First finger tighten all bolts evenly then sequentially torque the bolts in even steps.
 For 6" Conflats - Maximum torque 120-150 in/lbs. |
For Mini Conflats - Maximum Torque 20-30 in/lbs. |
Bakeout in normal fashion, but NEVER exceed 100oC with the micrometers attached during bakeout. Higher temperatures can damage the precision components. If the micrometers are removed, replace the shipping screw and bakeout up to 200oC. Note that the red knob on the shipping clamp screw is for initial easy identification. This red knob MUST be removed if the screw is used during bakeout. To remove it, hold the screw by its body and press or tap the cap off. Monitor the temperature during bakeout. Never translate the manipulator during bakeout or when it is above ambient temperature. Always remove any motor or limit switches before bakeout.
X-Y gib adjustment:Lateral alignment of the X-Y slides is maintained by special crossed roller bearings made of hardened carbon steel. These bearings will corrode. Do not allow moisture to condense on or in the bearings. Do not allow LN2 to chill the bearings. The X-Y slides have an adjustment for side play. This is set at the factory and usually does not need re-adjustment. In the event re-adjustment is necessary, this function should only be performed by a technician experienced in such adjustments. Make sure the slide bearing faces are clean and free from debris. Remove the micrometer of the axis to be adjusted so the slide moves freely. This is important because the technician must be able to feel whether or not the slide is tight or binds. Next, slightly loosen the bolts that retain the slide nearest the gib adjustment screws. Then re-adjust the side play and re-tighten the screws in the slide. Make sure the crossed roller cage is equidistant from both ends when the slides are in the middle of their travel. Do not over tighten the screws.
On specially-ordered manipulators, the top flange is non-tapped (non-threaded) to allow mounting devices with tapped bolt holes. To mount such a device to the traveling flange of a MA2000-series manipulator, vent the manipulator and remove it from the vacuum system. Next, remove the 4 screws that hold the flange ring on the top slide. Move the Z axis traveler towards the bottom (stationary) flange while supporting the top flange to prevent damage to the bellows. When there is enough room, install a new gasket and the mating equipment, inserting the lubricated bolts or studs only finger tight. Ensure that the new equipment is aligned appropriately as the top flange will no longer be rotatable after the bolts are tight. Support the new equipment securely to withstand the torque of tightening the bolts and to protect the bellows. Re-insert the traveling flange and retainer ring on the top slide of the MA2000.
Stepper motors and limit switches can easily be installed in the field. To install steppers on the X-Y axes, remove the micrometer bracket and the micrometer insertion bracket.
Replace them with the lead screw bracket and motor bracket. The limit switches mount to either side of the lead screw, in the threaded holes provided, as shown in the above illustration.
To install a stepper motor to the Z-axis, remove the Z-axis crank, Woodruff key and index. Install the flexible coupling to the lead screw in the area formerly occupied by the crank, tighten and install the motor bracket. Rotate the lead screw by hand to align the clamp screw in the flex coupling with the access hole in the motor bracket. Insert the motor shaft in the flex coupling. Make sure the motor flange is flush with the top of the bracket. Tighten the flex coupling to the motor shaft and fasten the motor to the bracket.
Under normal conditions, your manipulator will provide years of trouble-free service. As delivered, the lead screw and ball bearings are lubricated with molybdenum disulfide. Re-lubricate the ball bearings every third or fourth bake out with the molybdenum disulfide grease provided. Do not use a hydrocarbon grease such as Felpro C100TM for bearings or lead screws that will be baked because the hydrocarbon greases will cake and dry out. After several bakeouts, it may be necessary to re-lubricate the drive screw. Use the MoS2 grease in the supplied syringe. A small amount applied to the drive screw as you run it up and down is sufficient.
We have operated your unit prior to shipment to assure that it works properly. Prior to calling the factory, check to make certain you have removed all shipping constraints, have read these instructions, and have checked for shipping damage. If you do call, it is best to have the manipulator close to the phone, for ease of description.
Packaging for storage or re-shipment:The bellows on your unit is particularly susceptible to damage/contamination. Normal precautions for shipment are, therefore, usually inadequate. Please follow these guidelines:
- Work on a clean surface when packaging.
- Place aluminum foil over the bellows openings, then re-install the shipping covers. Do not allow any contamination to get into the bellows interior.
- Remove the micrometers. Place the screws in a bag. Wrap the micrometers and the bag in bubble pack.
- Re-install the shipping clamp screw.
- Wrap cardboard around the bellows and seal with tape. Make certain the cardboard extends up/down into the plate areas. The bellows is most susceptible to damage if the box is dropped and it bangs into the plates. Move the Z-axis to the fully compressed position.
- Place the unit in a polyethylene bag.
- Place the lower piece of foam-in-place packaging in the box (check the condition of the box and replace as necessary). Place the unit into the foam as indicated by the outline in the foam. Now place the micrometers into the box as indicated. Place the upper piece of foam-in-place packaging over the unit as indicated by the outline in it. Secure the box shut, and the manipulator is ready to ship or store.
- Hex wrench kit
- Spare screw kit
- Gasket kit
- Lubrication kit consisting of 1 each:
- High temperature silicone/MoS2 (black) grease for lead screws
- High temperature silicone (clear) grease for bearings
Replacement parts and non-warranty factory service are available on a fast turnaround basis. Please consult the factory with your specific need.