Electron Beam Evaporator

·        Evaporates Refractory Metals, Semiconductors and some Insulators

·        Crucible or Solid Rod Target Material

·        Integral Shutter

·        High Efficiency Cooling

·        Easy Access when Changing Material

·        Custom Mounting Lengths

·        Variable Nozzle Size - Can be exchanged in the field for different applications

Flexible and Easy to Use
            This compact electron-beam evaporator is a UHV-compatible source for the controlled deposition of metals, some semiconductors and insulators. Due to its small size and 2¾" (70 mm) CF flange mounting, it fits almost any existing UHV chamber. It is easy to use and maintain, includes water cooling, an integral shutter, all electrical and mechanical feedthroughs.

Crucible or Solid
            Evaporation is stimulated by electron bombardment of either a refractory crucible (various materials available) which contains the evaporant or a solid rod/wire with up to 1000 VDC @ 125 mA (125 watts). The material to be evaporated is centered in an easily-replaceable filament which has an infinitely-adjustable power of 0-12 Volts at 0-12 Amps. The user can replenish evaporated material without dismounting the entire source. An optional linear drive which moves the evaporant relative to the filament provides a focus adjustment for the electron beam. There are filament current and beam current / voltage displays via dual meters on the front panel of the control unit. The evaporator is also available with an optional linear drive for precise positioning of the crucible or rod evaporant.

Flux Monitor
            A small electrode in the flux of evaporated material collects ions present in the partially ionized environment. After initial calibration, this feature allows quick and easy return to known deposition rates.

Compact Size            The whole assembly mounts on a standard 2¾" CF flange and will clear the ID of a 1½" tube. Water I/O connections, power, thermocouple and the bellows-sealed shutter are conveniently located. The filament block can be easily removed for replacing / changing evaporative materials. Since custom fabrication usually costs no more than standard products at McAllister Technical Services, the flange-to-tip distance can be specified at time of order.